132. Chapter 131 ‘Point Light’ Test
Chapter 131 ‘Point Light’ Test
After returning to Pingjiang with the photosensitive chip, Kang Chi returned to his busy work. At the same time, for priority considerations, the camera issue had to be put on hold.
Time passed day by day, and the one-month improvement deadline mentioned by He Yong was getting closer and closer.
Finally, on November 13, He Yong called.
“The equipment has been modified, and the final inspection before the experiment is being done. It is expected that the test will start on the 15th.”
“Well, I’ll come tomorrow. Thank you for your hard work during this period.”
The two then chatted briefly and ended the call.
Then Kang Chi reorganized the R&D work of Datang Heavy Industry, confirmed that the project could proceed normally without him, and then set off for Changchun.
Two days later, in the clean laboratory of Changchun Institute of Optics, the researchers of the DPP-EUV light source project team were fully armed and stayed at their respective posts, conducting the final inspection before the test.
Kang Chi was also standing in the control room at this time, looking at the light source equipment inside, which was about the size of an ordinary bedroom, through the glass, and his heart was also full of expectations.
As long as the light source is fixed, the development progress of his lithography machine can at least increase by one third.
In addition to the lens manufacturing equipment that Pingjiang has assembled and the workpiece table that is being tackled.
The time for the integration and debugging of the three major parts of the EUV lithography machine is just around the corner.
After He Yong checked the main parameters of the equipment and the experimental conditions, he walked to Kang Chi and said in a low voice: “All parameters have been checked and it’s time to start.”
”Let’s start.”
”Yes!”
This experiment is mainly divided into two stages.
In the first stage, only the equipment is powered on, and then tin gas is sprayed to test whether the magnetic field can absorb the tin gas into the waste collector as expected.
After He Yong issued the order to start the experiment, the staff inside and outside the laboratory immediately started to act.
The equipment is powered on, the magnetic field is pressurized…
As the data on the screen jumped wildly, the number finally stopped at 3,000 gauss.
This magnetic field strength is obviously not comparable to the magnetic field strength of hundreds of thousands of Gauss in controlled nuclear fusion, but the two have different volumes and purposes, so there is actually no comparison. For EUV light sources, it is only necessary to confine plasma and tin liquid debris. Any higher intensity will only waste electricity.
”First injection preparation, injection!”
As the staff pressed the button… nothing seemed to happen.
Well, this is not a rocket launch, and it is impossible for people to see the injection of tin gas with the naked eye…
In the LPP scheme of using laser to hit tin liquid, in order to produce a stable and high-power light source, it is necessary to emit 50,000 lasers per second and hit the tin liquid every time.
In the DPP scheme, it is achieved through the energization “ignition” frequency of the positive and negative electrodes. The technical difficulty is much simpler. At the same time, because the frequency of the photoelectric switch is not difficult to increase, the power increase space is very large.
The real limitation is the injection frequency of tin gas.
Limited by the physical structure, the current spray frequency is only 20,000 times per second.
Since the spray frequency cannot be increased, Kang Chi directly did a miracle by increasing the amount of each spray, and electrocuted it five or even ten times for each spray, so as to convert the tin into plasma to the greatest extent.
Anyway, there is a magnetic field constraint, so there is no need to worry about gas, debris and plasma flying around in the electric shock.
Even so, the frequency of 20,000 times per second is also exaggerated.
The experimental results can only be observed by replaying the experimental data through high-speed cameras and various analytical instruments.
After ten minutes, the analysis results of the test came out.
”No tin element leakage was found, and all the tin gas condensed into liquid after 0.8 seconds and entered the waste collector smoothly!”
When the analyst read out the results excitedly, everyone’s face showed a look of joy.
This shows that the most important magnetic field design supporting this design plan is feasible! Everyone can already feel the warmth of the dawn of victory shining on their faces!
He Yong took a deep breath, suppressed his inner excitement, and said in a deep voice: “Continue to the next step, 10 seconds of continuous spray.”
Then,
10 seconds, 30 seconds, 1 minute, 10 minutes, 30 minutes! The intensity of the test continued to increase, but without exception, all were successfully completed! He Yong finally couldn’t suppress the joy on his face, and reported to Kang Chi excitedly: “Dr. Kang… all the first phase experiments passed successfully!”
Kang Chi nodded: “Then let’s start the second phase directly.”
”Okay!”
Although everyone was a little hungry after a morning of experiments, at this juncture, no one would have the idea of eating and coming back to continue testing.
Everyone held their breath, looking forward to this machine that condensed their countless days and nights of hard work and successfully “lit up” another more promising technical route! ”First ionization preparation, start!”
As soon as the voice fell, the data from the light collector was transmitted to the big screen.
The extreme ultraviolet light parameter jumped directly from 0W to 500W!
Although this 500W extreme ultraviolet light lasted only 0.00002 seconds, everyone knew that one of their hands had touched the door to success! “500W, we succeeded!”
Everyone could no longer suppress their excitement and stood up to applaud Kang Chi.
Kang Chi couldn’t help but smile: “Yes, we succeeded.”
However, this is a phased verification, which only means that this technical line is real and feasible.
Next, they will continue to improve the experimental intensity like the first phase of the experiment to determine whether it can run stably and directly enter the commercial stage.
Ten minutes later, the specific analysis data came out. When the tin metal was just ionized, the magnetic field still completed its mission.
It is like an invisible cage, firmly binding the entire luminous area, and no matter touches the equipment that should not be touched.
Then Kang Chi asked He Yong to increase the intensity, from 10 seconds to 1 minute, and the third round was 30 minutes!
A stable light source for half an hour! At this point, it can be basically proved that this DPP-EUV light source has commercial value!
When the last test of the day was over, the whole laboratory was boiling.
”Success, really successful!”
”We have a 500W EUV light source!”
”My God, Dr. Kang’s improvement actually went directly from 80W to 500W!”
Applause and cheers echoed repeatedly in the control room.
Everyone hugged each other through thick protective clothing, and excited tears sprinkled on the transparent protective mask, adding to the joyful atmosphere of the laboratory.
Seeing this scene in front of him, He Yong’s body couldn’t help but tremble.
He didn’t know how many times he had dreamed of such a scene.
Until today, the dream finally came true.
It’s a pity that this success was not brought by him…
He Yong turned his head and looked at the young man beside him with a complicated expression.
In their research institute, people of this age can probably only be found among the assistants, right?
“Congratulations, you won.”
”Thank you.”
Kang Chi could also feel the disappointment in He Yong’s excitement, so he comforted him: “If it weren’t for the solid foundation you laid before and the equipment improvement that was completed so quickly, this day would definitely not have come so soon.”
”In fact, I don’t want to be the last one to pick peaches, that would be so annoying… As long as you can supply me at cost price according to the previous agreement, and then give me 30% of the profit of the technical patent, the rest will be done.”
He Yong shook his head: “Don’t worry, I will fill in the experimental report truthfully. Even if such a great credit is attributed to me, I can’t bear it. Being able to share some of the hard work is enough for me to be proud before I die.”
Uh…
Although his words are a bit strange, it seems to be the truth.
The power suddenly increased from 80W to 500W, which was a huge achievement.
Even if He Yong could only take a small part of the credit, it was much more impressive than his previous breakthroughs of a few watts or tens of watts.
(End of this chapter)